イノウエ リョウタロウ   Ryotaro Inoue
  井上 亮太郎
   所属   追手門学院大学  理工学部 電気電子工学科
   職種   准教授
言語種別 英語
発行・発表の年月 2006
形態種別 論文
標題 Transmission-mode scanning probe laser terahertz emission microscope
執筆形態 共著・編著(代表編著を除く)
掲載区分国外
著者・共著者 N. Uchida,R. Inoue,I. Kawayama,H. Murakami,M. Tonouchi
概要 We developed a transmission-mode scanning probe laser terahertz emission microscope (sp-LTEM). Femtosecond (fs) optical pulses are delivered and focused on the sample by an optical fiber probe with a beam diameter of 5 μm. The transmission-mode sp-LTEM system is superior to the conventional reflection-mode sp-LTEM system in the viewpoint of the signal sensitivity because emitted THz waves can be detected without being disturbed by the scanning probe itself. The spatial resolution is experimentally estimated as ∼2 μm with the gold line and space patterns on a low-temperature-grown gallium arsenide (LT-GaAs) substrate. ©2006 IEEE.