ウエダ　ヨシオ   Ueda Yoshio   上田　良夫    所属   追手門学院大学  理工学部 電気電子工学科    職種   教授
言語種別	英語
発行・発表の年月	1995/06
形態種別	論文
査読	査読あり
標題	BEAM FOCUSING OF LOW-ENERGY ION-SOURCE BY APERTURE DISPLACEMENT
執筆形態	共著・編著（代表編著を除く）
掲載誌名	REVIEW OF SCIENTIFIC INSTRUMENTS
掲載区分	国外
出版社・発行元	AMER INST PHYSICS
巻・号・頁	66(6),pp.3443-3447
担当区分	筆頭著者
著者・共著者	Y UEDA,T YOSHIKAWA,M NISHIKAWA,S GOTO
概要	For low-energy plasma ion source (<1 keV), the narrow acceleration gap and application of high accel-decel voltage ratio are useful for obtaining high brightness ion beam. This paper describes these effects in a triode multiaperture extraction system on the characteristics of geometrical focusing by aperture displacement experimentally. Beam parameters such as focal length and beam divergence were estimated from a two-dimensional (axial and radial) power density profile by a Gaussian beamlet model. It is found that this model agrees very well with the beam power density profile. The relation of focal length with aperture displacement roughly agrees with the analytical model derived by Conrad. However, the effective gap width for the model is not simply determined from the aperture geometry. © 1995 American Institute of Physics.
DOI	10.1063/1.1145520
ISSN	0034-6748
NAID	80008415846