ウエダ　ヨシオ   Ueda Yoshio   上田　良夫    所属   追手門学院大学  理工学部 電気電子工学科    職種   教授
言語種別	英語
発行・発表の年月	1995/07
形態種別	論文
査読	査読あり
標題	EFFECTS OF AMBIENT GAS IN-BEAM DRIFT SPACE ON PERFORMANCE OF HIGH-BRIGHTNESS AND LOW-ENERGY ION BEAM
執筆形態	共著・編著（代表編著を除く）
掲載誌名	REVIEW OF SCIENTIFIC INSTRUMENTS
掲載区分	国外
出版社・発行元	AMER INST PHYSICS
巻・号・頁	66(7),pp.3869-3872
著者・共著者	T YOSHIKAWA,S NAKAMURA,Y UEDA,M NISHIKAWA,S GOTO
概要	Effects of the ambient gas in the ion drift space on the transport property of the law energy (155 eV) and high brightness beam are studied experimentally. A bucket ion source with single-aperture triode extraction is used. Beam characteristics such as the divergence angle and the current density are improved by the increase in the ambient gas pressure in the high brightness beam (high deceleration voltage, -2000 V), but not in the low brightness beam (low deceleration voltage, -600 V). The beam spreading due to the space charge of the ion beam is seen at the low ambient gas pressure when the central current density, which is measured at 35 cm downstream side from the electrode system, exceeds 5 mu A/cm(2). The electron density in the ion-beam plasma increases with the ambient gas pressure, but the space charge is not sufficiently neutralized by the electrons produced by the ambient gas atom ionization. (C) 1995 American Institute of Physics.
DOI	10.1063/1.1145451
ISSN	0034-6748
NAID	30015947116