ウエダ　ヨシオ   Ueda Yoshio   上田　良夫    所属   追手門学院大学  理工学部 電気電子工学科    職種   教授
言語種別	英語
発行・発表の年月	1996/03
形態種別	論文
査読	査読あり
標題	Discharge characteristics of bucket source and its effects on very low energy beam
執筆形態	共著・編著（代表編著を除く）
掲載誌名	REVIEW OF SCIENTIFIC INSTRUMENTS
掲載区分	国外
出版社・発行元	AMER INST PHYSICS
巻・号・頁	67(3),pp.1390-1392
担当区分	筆頭著者
著者・共著者	Y Ueda,T Yoshikawa,Y Ito,M Nishikawa,S Goto
概要	The effects of source plasma parameters and space charge neutralization on energy spread of very low energy and high perveance ion beam have been studied experimentally. Plasma parameters of a bucket source were changed by shorting an are chamber and a positive electrode (a plasma electrode) to deteriorate electron confinement. Although the change of plasma potential reflected the beam energy and the change of energy spread was observed, the relation between the plasma parameters and energy spread is unclear. Space charge neutralization of the ion beam by supplying thermal electron and increasing gas pressure in beam transport region showed reduction of the energy spread. This result suggests that the space charge effects of the ion beam plays an important role in energy broadening. (C) 1996 American Institute of Physics.
DOI	10.1063/1.1146678
ISSN	0034-6748/1089-7623
NAID	80008870206