ウエダ　ヨシオ   Ueda Yoshio   上田　良夫    所属   追手門学院大学  理工学部 電気電子工学科    職種   教授
言語種別	英語
発行・発表の年月	2018/04/01
形態種別	論文
査読	査読あり
標題	Ethanol gas sensing performance of high-dimensional fuzz metal oxide nanostructure
執筆形態	共著・編著（代表編著を除く）
掲載誌名	Japanese Journal of Applied Physics
掲載区分	国外
出版社・発行元	Japan Society of Applied Physics
巻・号・頁	57(4)
著者・共著者	Kenzo Ibano,Yoshihiro Kimura,Tohru Sugahara,Heun Tae Lee,Yoshio Ueda
概要	Gas sensing ability of the He plasma induced fiber-like nanostructure, so-called fuzz structure, was firstly examined. A thin Mo layer deposited on a quartz surface was irradiated by He plasma to form the fuzz structure and oxidized by annealing in a quartz furnace. Electric conductivity of the fuzz Mo oxide layer was then measured through the Au electrodes deposited on the layer. Changes in electric conductivity by C2H5OH gas flow were examined as a function of temperature from 200 to 400 °C. Improved sensitivities were observed for the specimens after a fuzz nanostructure formation. However, the sensor developed in this study showed lower sensitivities than previously reported MoO3 nano-rod sensor, further optimization of oxidation is needed to improve the sensitivity.
DOI	10.7567/JJAP.57.040316
ISSN	1347-4065/1347-4065